JPH01104036U - - Google Patents
Info
- Publication number
- JPH01104036U JPH01104036U JP19757287U JP19757287U JPH01104036U JP H01104036 U JPH01104036 U JP H01104036U JP 19757287 U JP19757287 U JP 19757287U JP 19757287 U JP19757287 U JP 19757287U JP H01104036 U JPH01104036 U JP H01104036U
- Authority
- JP
- Japan
- Prior art keywords
- spring
- clamping arms
- wafer
- gripping mechanism
- wafer holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19757287U JPH01104036U (en]) | 1987-12-28 | 1987-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19757287U JPH01104036U (en]) | 1987-12-28 | 1987-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01104036U true JPH01104036U (en]) | 1989-07-13 |
Family
ID=31488118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19757287U Pending JPH01104036U (en]) | 1987-12-28 | 1987-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01104036U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009083031A (ja) * | 2007-09-28 | 2009-04-23 | Nidec Sankyo Corp | 産業用ロボット |
-
1987
- 1987-12-28 JP JP19757287U patent/JPH01104036U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009083031A (ja) * | 2007-09-28 | 2009-04-23 | Nidec Sankyo Corp | 産業用ロボット |